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The diameter of HOLZ rings is related to the distance between atoms in a zone-axis direction, and has been used by Michael and Eades (2000) to determine lattice parameters. Beyond the HOLZ rings, the Kikuchi bands become the more familiar BKPs. The combination of intensity from both coherent and incoherent scattering processes in the RHEED image complicates quantitative analysis because it requires a unified treatment within the dynamical high-energy diffraction theory (Winkelmann, 2010). 4 RHEED and Kikuchi pattern obtained at 40 keV from a (100) surface of single-crystal GaAs.

Rijnders, G. Koster and H. Rogalla, In-situ monitoring by reflective high energy electron diffraction during pulsed laser deposition, Appl. Surf. Sci. 138, 17 (1999) Christen, D. , Recent advances in pulsed-laser deposition of complex oxides, J. Phys. – Condensed Matter 20, 264005 (2008) Dam, B. and B. Stauble-Pumpin, Growth mode issues in epitaxy of complex oxide thin films, J. Mater. -Mater. El. D. J. Whelan, Dynamical electron-scattering from growing surfaces, Surf. Sci. B. , Dynamics of laser-ablation plume penetration through low-pressure background gases, Appl.

Reprinted with permission (Baba-Kishi, 2002). ratios of the d-spacings and interzonal angles of the principal reflections, then simulate the BKP, and finally test the resulting match to the experimental pattern. , 1992; Schwarzer, 1997). This automation is possible using most commercial EBSD software packages. It is worth highlighting that Kikuchi pattern formation is inherently a multiple scattering phenomenon, which can influence the intensity comparison between the experimental patterns and simulated patterns based on kinematic theory.

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